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| Description | Part Number | Version | Stock |
| DIGITAL
I / O CARD | 0100-11002 | Old type | 47 |
| DI /O | 0100-20003 | New type | 41 |
| ANALOG / OUTPUT | 0100-11001 | Old type | 14 |
| ANALOG / INPUT | 0100-09054 | Old type | 12 |
| MIZAR | 0100-09003 | | 2 |
| MIZAR | 0100-09169 | | 5 |
| STEPPER DRIVE | 0100-00003 | | 39 |
| VGA CONTROLLER | 0190-76050 | | 1 |
| 0100-00825 | | 1 |
| ANALOG I / O | 0100-00396 | New type | 1 |
| ANALOG I / O | 0100-20100 | New type | 1 |
| SERIPLEX | 0190-35775 | | 1 |
| AMAT 486 | 61-0367-36 | | 2 |
| V21 SBC | 0069-76110 | | 4 |
| DIGITAL I / O | 0100-01321 | New type | 1 |
| GAS PANEL | 0100-09153 | | 3 |
| GAS PANEL | 0100-09114 | | 2 |
| CONTOLLER DISTRIBUTION WPS | 0100-70019 | | 2 |
| CONTOLLER DISTRIBUTION WPS | 0100-09102 | | 1 |
| FA ITC INTERFACE | 0226-31593 | | 2 |
| GAS VALVE INTERCONNECT | 0100-70015 | | 4 |
| CENTER FINDER | 0100-09146 | | 10 |
| RS 232 VIDEO INTERCONNECT | 0100-09145 | | 3 |
| RS 233 VIDEO INTERCONNECT | 0100-09018 | | 1 |
| REMOTE GAS PANEL | 0100-09031 | | 1 |
| EXPANDED GAS PANEL INTERFACE | 0100-09106 | | 5 |
| SSR AC CONTROL | 0100-09040 | | 10 |
| SYNC DETECT PWB | 0100-00132 | | 1 |
| ISOLATION AMPLIFIER | 0100-00156 | | 1 |
| INDEX CONTROL | 0100-90889 | | 1 |
| MXP CHAMBER INTERFACE | 0100-35054 | | 2 |
| INTERLOCK CONTROL | 0100-09201 | | 2 |
| CONTOLLER INTERCONNECT CH TRAY | 0100-00245 | | 4 |
| LAMBDA 15V POWER SUPPLY | | | 15 |
| LAMBDA 12V POWER SUPPLY | | | 7 |
| MOTOR CONTROLLER | 881-620520-1 | | 2 |
| CHOPPER DRIVER | 0100-51017 | | 3 |
| CHOPPER DRIVER | 0100-00011 | | 10 |
| CHOPPER DRIVER | | SAMSUNG | 2 |
| LIQUID SOURCE INTERFACE | 0100-09034 | | 6 |
| THERMAL ELECTRIC DRIVER | 0100-09112 | | 5 |
| THERMAL ELECTRIC DRIVER | 0090-09061 | | 2 |
| THERMAL ELECTRIC DRIVER | 0090-09115 | | 1 |
| TC GAUGE | 0100-00008 | | 14 |
| OPTO DETECT | 0100-00014 | | 23 |
| STEPPING MOTOR DRIVE | 8734197 | | 20 |
| HEAT EXCHANGER INTERFACE | 0100-09041 | | 1 |
| HEAT EXCHANGER INTERFACE | 0100-09165 | | 4 |
| EPD 386 CPU | 916023 | | 1 |
| PNEUMATIC DISTRIBUTION | 0100-09242 | | 1 |
| LASER DRIVER | 0100-20078 | | 1 |
| TURBO INTERCONNECT | 0100-09029 | | 8 |
| COTROLLER DISTRIBUTION WPS | 0100-70019 | | 2 |
| BOX HEATER CONTROL | 0100-09094 | | 1 |
| ROBOT INTERCONNECT | 0100-76053 | | 1 |
| ROBOT INTERCONNECT | 0100-09138 | | 2 |
| SBC I / O BREAKOUT | 0100-09071 | | 2 |
| ASP CHAMBER INTERFACE | 0100-09222 | | 1 |
| ORIENT CCD | 0100-20068 | | 2 |
| SERIAL ISOLATOR | 0100-35065 | | 1 |
| E - CHUCK CONTROLLER | 0100-09196 | | 1 |
| E - CHUCK POWER SUPPLY | 0100-40033 | | 1 |
| CVD T / C AMP | 0100-09108 | | 10 |
| EPD EIGHT CHANNEL EMISSION LASER | 0100-09172 | | 7 |
| CHAMBER INTERCONNECT | 0100-18062 | | 1 |
| CHAMBER INTERCONNECT | 0100-00246 | | 1 |
| CHAMBER INTERCONNECT | 0100-09099 | | 29 |
| CHAMBER INTERCONNECT | 0100-09017 | | 3 |
| VDS INTERFACE | 0100-09205 | | 43 |
| MANOMITOR SELECT | 0100-09162 | | 5 |
| AC INTERCONNECT | 0100-09103 | | 3 |
| ENCODER INTERFACE | 0100-09137 | | 3 |
| OPERATOR CONTOL PANEL | 0100-09058 | | 1 |
| MCVD END POINT | 0100-09226 | | 1 |
| WAFER SENSOR | 0100-09123 | | 6 |
| HEAT EXCHANGER DISTRIBUTION | 0100-20049 | | 1 |
| PLASMA DETECT ULTIMA CLEAN | 0100-18035 | | 1 |
| RELAY INTERLOCK | 0100-09305 | | 4 |
| LEVEL SENSOR | 0100-09108 | | 3 |
| MONITOR LIGHT PEN | 0100-09084 | | 6 |
| 3WAY LIGHT PEN | 0100-35147 | | 3 |
| HELIUM CONTROL | 0100-00171 | | 10 |
| STEC HELIUM INTERFACE | 0225-02861 | | 5 |
| MONITOR VGA | | | 1 |
| GAS PANEL ANALOG | 0100-09115 | | 2 |
| LOADER INTERCONNECT | 0100-09127 | | 6 |
| MFC GENDER | 900231 | | 15 |
| ROBOT EXTENSION INTERCONNECT | 0100-09139 | | 3 |
| DPS CHAMBER INTERFACE | 0100-35138 | | 1 |
| MCVD CHAMBER INTERFACE | 0100-35054 | | 1 |
| WAFER ORIENT | 0100-76128 | | 1 |
| WAFER ORIENT | 0100-20069 | | 1 |
| INTELLIGENT INTERFACE | 0100-09006 | | 12 |
| INTELLIGENT INTERFACE | 0100-09055 | | 5 |
| AI MUX / CURRENT SENER | 0100-09011 | | 6 |
| MINI AI / O | 0100-09022 | | 4 |
| ESC CONTROLL | 0100-09169 | | 8 |
| ESC CONTROLL | 0100-35227 | | 1 |
| ESC CONTROLL | 0100-39739 | | 1 |
| ESC CONTROLL | 0010-39769 | | 1 |
| BUFFER I / O | 0100-09009 | | 10 |
| ENHANCED OTF CENTER FINDER | 0100-76042 | | 3 |
| ISO AMP | 0100-20012 | | 3 |
| MIMI DI / O SHORT CIRCUIT PROTECTED | 0100-09136 | | 3 |
| CONVECTRON GAUGE | 012141-102 | | 1 |
| TEOS GAS INTERFACE | 0226-44174 | | 1 |
| TEOS GAS INTERFACE | 0100-09107 | | 2 |
| TEOS GAS INTERFACE | 0100-09133 | | 1 |
| DI / O FUSE | 0100-09117 | | 30 |
| DI / O FUSE | 0100-09134 | | 21 |
| FUSE | 0100-09020 | | 10 |
| STEC MFC ADAPTOR | 0100-35102 | | 6 |
| REMOTE SUPPLY DISTRIBUTION | 0100-20040 | | 1 |
| STEPPER POWER DRIVER | 0100-09086 | | 2 |
| MINI FILTER | 0100-09110 | | 1 |
| FLUID OVERFILL | 0100-09131 | | 2 |
| MAG GEN INTERFACE | 0100-09218 | | 1 |
| CONTACTOR INTERLOCK | 0100-09104 | | 1 |
| 0100-09225 | | 4 |
| TEOS STATUS | 0100-09129 | | 1 |
| MATCH CONTROL | 0100-09156 | | 3 |
| EP VGA I / O INTERCONNECT | 0100-70034 | | 3 |
| INTERFACE PROCESSOR DIST | 0100-13024 | | 1 |
| VME INT 2 EXT GP | 0100-09116 | | 1 |
| SIGNAL LAMP PCB | 0226-31128 | | 1 |
| VAC PUMP REM GAS INTTERLOCKS INTERCONNECT | 0100-20243 | | 1 |
| 486 PC INTERFACE | 0100-09264 | | 2 |
| 486 PC INTERFACE | 0100-76056 | | 1 |
| RECIPE SELECT INTERCONNECT | 0100-00168 | | 2 |
| REMOTE WIRING DISTRIBUTION | 0100-09126 | | 4 |
| ESC POWER CARDCAGE | 0100-09212 | | 5 |
| LOADLOCK WAFER SENSOR | 0100-20143 | | 1 |
| 486 PC RS 232 DISTRIBUTION | 0100-09271 | | 1 |
| DUEL FREQ WIRING INTERCONNECT | 0100-09237 | | 1 |
| CYCLE PUMP / PURGE I / O INTERFACE | 0100-09232 | | 3 |
| EXPANDED RS 232 INTERCONNECT | 0100-09161 | | 2 |
| SEI | 0100-20001 | | 6 |
| STEPPER CONTROLLER | 0110-00979 | | 1 |
| SYSTEM ELECTRONICS BACKPLANE | 0100-09010 | | 1 |
| MAG & LAMP DISTRIBUTION | 0100-20070 | | 1 |
| TC & INTERLOCK | 0100-35260 | | 1 |
| FLAT FINDER MOTOR DRIVE | 0100-00110 | | 2 |
| BRAKE INTERCONNECT | 0100-09076 | | 5 |
| P.S.
BACKPLANE | 0100-09012 | | 1 |
| SEPS PCB | 0100-55002 | | 1 |
| P 5000 WIRING
DISTRIBUTION | 0100-09304 | | 2 |
| P 5001 WIRING DISTRIBUTION | 0100-76181 | | 2 |
| EXP. I
/ O DISTRIBUTION | 0100-00162 | | 4 |
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